Add to ORKGWe study the dynamics of an electrostatically driven impact microactuator reported by Mita and associates. The microactuator is modeled as a two-degree-of-freedom rigid multibody system. The impact phenomenon is de-scribed by a simple impact law based on Newton’s coeffi-cient of restitution. The system dynamics is intensively studied. We investigate the influence of various param-eters including excitation frequency and voltage
Electrically driven impact microactuators generate nanoscale displacements without large driving dis...
A parameterized model for the impact dynamics of a piezoelectric microactuator is proposed, and a sy...
For MEMS devices actuated by electrostatic force, unexpected failure modes can be hardly predicted w...
Abstract. We study the dynamics of an electrostatically driven impact microac-tuator. Impact between...
We study the dynamics of an electrostatically driven impact microactuator. Impact between moving ele...
We study the dynamics of an electrostatically driven impact microactuator. Impact between moving ele...
Micro or nano distance manipulations are of prime importance in the MEMS industry. Microdevices are ...
Micro or nano distance manipulations are of prime importance in the MEMS industry. Microdevices are ...
Micro or nano distance manipulations are of prime importance in the MEMS industry. Microdevices are ...
Received date Accepted date The main aim of this paper is to focus on analysis of the dynamic proper...
A dynamic model of a microcantilever actuator is developed to simulate the events of contact, impact...
A dynamic model of a microcantilever actuator is developed to simulate the events of contact, impact...
The purpose of this work is the experimental investigation and the mathematical modeling of the impa...
The motion of micromachined bidirectional electrothermal vibromotors (BETV) is analyzed using an imp...
Summary Impact microactuators rely on repeated collisions to generate gross displacements of a micro...
Electrically driven impact microactuators generate nanoscale displacements without large driving dis...
A parameterized model for the impact dynamics of a piezoelectric microactuator is proposed, and a sy...
For MEMS devices actuated by electrostatic force, unexpected failure modes can be hardly predicted w...
Abstract. We study the dynamics of an electrostatically driven impact microac-tuator. Impact between...
We study the dynamics of an electrostatically driven impact microactuator. Impact between moving ele...
We study the dynamics of an electrostatically driven impact microactuator. Impact between moving ele...
Micro or nano distance manipulations are of prime importance in the MEMS industry. Microdevices are ...
Micro or nano distance manipulations are of prime importance in the MEMS industry. Microdevices are ...
Micro or nano distance manipulations are of prime importance in the MEMS industry. Microdevices are ...
Received date Accepted date The main aim of this paper is to focus on analysis of the dynamic proper...
A dynamic model of a microcantilever actuator is developed to simulate the events of contact, impact...
A dynamic model of a microcantilever actuator is developed to simulate the events of contact, impact...
The purpose of this work is the experimental investigation and the mathematical modeling of the impa...
The motion of micromachined bidirectional electrothermal vibromotors (BETV) is analyzed using an imp...
Summary Impact microactuators rely on repeated collisions to generate gross displacements of a micro...
Electrically driven impact microactuators generate nanoscale displacements without large driving dis...
A parameterized model for the impact dynamics of a piezoelectric microactuator is proposed, and a sy...
For MEMS devices actuated by electrostatic force, unexpected failure modes can be hardly predicted w...