Ultra-Thin Organic Layer Stacks – A New Vacuum Deposition Solution

A precise system for a discreet, successive deposition of ultra-thin layers by individual polyimide (PI) precursors was worked out. The discontinuation of the different molecular flows by a controllable closure of their sources allows for the build – up of a multi-layer (stack) system with precursor layers of programmed thickness. The method renders a possibility for creating laminar molecular fluxes which is a guarantee for the production of films devoid of defects. By means of controlling the evaporation time of the individual sources varying from microseconds to seconds a control of the chemical composition of the organic layer (thickness < 100 nm) is made possible and hence its micromechanical, electrical and optical parameters