Fast movement strategies for a step-and-scan wafer stepper

We describe algorithms for the determination of fast movement strategies for a step-and-scan wafer stepper, a device that is used for the photolitho-graphic processing of integrated circuits. The proposed solution strategy consists of two parts. First, we determine the maximum number of congruent rectangular chips that can be packed on a wafer, subject to the restriction that the chips are placed in a rectangular grid. Second, we find fast movement strategies for scanning all chips of a given packing, given the mechanical restrictions of the wafer stepper. The corresponding com-binatorial optimization problem is formulated as a generalized asymmetric traveling salesman problem. We show how feasible scan strategies are determined, and how these strategies are improved by local search techniques, such as iterative improvement based on 2- and 3-exchanges, and simulated annealing based on 2-exchanges