A Model-Based Approach to Fault Diagnosis of Embedded Systems

The problems that arise from the integration of sub-systems into complex, multi-disciplinary embedded systems, are a potential obstruction for the expected, exponential growth in embedded systems applica-tions. Faults that occur because of the dynamic be-havior of the integrated system are difficult to trace back to individual subsystems or components. The Model-Based Diagnosis (MBD) methodology offers a solution for the fault diagnosis of the integrated system by inferring the health of a system from a compositional system model and real-world measure-ments. In this paper we present the initial results of our MBD research as applied on the lithography sys-tems of ASML. We explain our methodology based on a modelling language LYDIA which is specifically being developed for the purpose of MBD. Further-more we discuss the results of our first diagnosis test case.