Sensitivity of a miniaturized touch probe sensor using PZT thin

In this paper, an improved touch probe sensor device for higher sensitivity and low contact force is reported. In order to improve the resolution, we have evaluated the sensitivity and fabricated a miniaturized sensor. The sensor transducer was 3 mm long and had higher resonance frequency. The resonance frequency of the vibrator was 937 kHz. Evaluated sensitivity was 1:0 101 mV/nm. This value equals five times larger than that of a previous sensor. Miniaturization of the sensor device carried smaller vibratio