Add to ORKGWe present a 1.5D particle code for the modelling of parallel plate, capacitively coupled radio frequency discharge plasmas in hydrogen, which includes a rigorous kinetic modelling of ion transport and several solutions to speed up the convergence. In a test case the effect of pressure on the kinetics of charged particles and the plasma potential is analyzed. The relevance of the results of this kind of studies for material science is discussed
This paper investigates the dependence of plasma density and self-bias voltage with excitation frequ...
A particle-in-cell plus Monte Carlo collision model is employed to investigate the low pressure hydr...
We have worked on the development of a particle-based numerical model of a hydrogen Radio Frequency ...
In this paper we present a parametric study of the effect of discharge voltage on capacitively coup...
The results of the numerical modeling of a capacitively coupled hydrogen plasma are presented. We re...
Hydrogen is the main component of many feeding mixtures used for plasma processing. Despite this, t...
This work presents modeling and experimental results for the electrical characterization of capaciti...
This paper presents a systematic characterization of hydrogen capacitively coupled very high frequen...
The paper presents a systematic characterization of pure hydrogen capacitively coupled discharges, p...
This paper reviews the basis and the successes with the fluid modelling of capacitively coupled radi...
This paper presents a systematic characterization of hydrogen capacitively coupled very high frequen...
This paper presents a systematic characterization of a pure hydrogen capacitively coupled radio freq...
Capacitively coupled radio-frequency (ccrf) discharges are still among the most powerful and flexibl...
A particle-in-cell plus Monte Carlo collision model is employed to investigate the low pressure hydr...
In this paper we present the self consistent coupling of a 2D model of a parallel plate radio freque...
This paper investigates the dependence of plasma density and self-bias voltage with excitation frequ...
A particle-in-cell plus Monte Carlo collision model is employed to investigate the low pressure hydr...
We have worked on the development of a particle-based numerical model of a hydrogen Radio Frequency ...
In this paper we present a parametric study of the effect of discharge voltage on capacitively coup...
The results of the numerical modeling of a capacitively coupled hydrogen plasma are presented. We re...
Hydrogen is the main component of many feeding mixtures used for plasma processing. Despite this, t...
This work presents modeling and experimental results for the electrical characterization of capaciti...
This paper presents a systematic characterization of hydrogen capacitively coupled very high frequen...
The paper presents a systematic characterization of pure hydrogen capacitively coupled discharges, p...
This paper reviews the basis and the successes with the fluid modelling of capacitively coupled radi...
This paper presents a systematic characterization of hydrogen capacitively coupled very high frequen...
This paper presents a systematic characterization of a pure hydrogen capacitively coupled radio freq...
Capacitively coupled radio-frequency (ccrf) discharges are still among the most powerful and flexibl...
A particle-in-cell plus Monte Carlo collision model is employed to investigate the low pressure hydr...
In this paper we present the self consistent coupling of a 2D model of a parallel plate radio freque...
This paper investigates the dependence of plasma density and self-bias voltage with excitation frequ...
A particle-in-cell plus Monte Carlo collision model is employed to investigate the low pressure hydr...
We have worked on the development of a particle-based numerical model of a hydrogen Radio Frequency ...