Investigation of Light Source Wall Cleaning Methods

Abstract – This work is devoted to the investigation of different glass cleaning methods by means of a high-frequency (about 100 MHz) electrodeless dis-charge plasma mainly for the light source technol-ogy needs. For experiments the helium discharge was used in the pressure range 0.2 < p < 7 Torr. The lamp vessel training efficiency was investi-gated using emission spectroscopy. The spectra of pollution elements and helium lines were registered using different cleaning methods in dependence on the helium pressure and the discharge power. In addition, a stationary collisional-radiative model for helium high frequency electrodeless discharge was developed. Results of the calculations are com-pared with experimental results. Important plasma parameters, such as electron temperature, ab-sorbed power, spectral line intensity versus dis-charge current, are estimated. 1