Add to ORKGUltra precise multi-axis positioning and measuring ma-chines have been identified as an enabling tool in the current developments in nanotechnology and further beyond. Therefore machines with an increasingly larg
Micro/nano-positioning stages are at the core of a wide range of machines and instruments such as li...
This paper presents work on the prototype of an innovative ductile 5-axis precision grinding machine...
This short study shows that in the European area high efforts are made to develop more and more prec...
Design for Precision’ reviews the status quo in Precision Engineering and concludes that today's pre...
The demands on the accuracy of mechanical devices for precision motion are rapidly raising in submic...
Existing long range nanopositioning and nanomeasuring machines are based on three independent linear...
There is a strong demand for ultra-high precision positioning devices in many modern precision machi...
There is a strong demand for ultra-high precision positioning devices in many modern precision machi...
Highly-effective grinding of aspherical and freeform surfaces to optical quality at low cost has imp...
High precision positioning and measuring ma-chines have to face the demand for large mov-ing and mea...
Manufacturing environments will require advanced machine tools equipped with an ultraprecision machi...
High throughput qualification of semiconductor devices is needed to improve cost efficiency. This pa...
Ultra high precision positioning and measuring ma-chines have to face the demand for increasing movi...
The majority of nanopositioning and nanomeasuring machines (NPMMs) are based on three independent li...
Production machines for next generation LSIs such as 4G-DRAMs and for large liquid crystal displays ...
Micro/nano-positioning stages are at the core of a wide range of machines and instruments such as li...
This paper presents work on the prototype of an innovative ductile 5-axis precision grinding machine...
This short study shows that in the European area high efforts are made to develop more and more prec...
Design for Precision’ reviews the status quo in Precision Engineering and concludes that today's pre...
The demands on the accuracy of mechanical devices for precision motion are rapidly raising in submic...
Existing long range nanopositioning and nanomeasuring machines are based on three independent linear...
There is a strong demand for ultra-high precision positioning devices in many modern precision machi...
There is a strong demand for ultra-high precision positioning devices in many modern precision machi...
Highly-effective grinding of aspherical and freeform surfaces to optical quality at low cost has imp...
High precision positioning and measuring ma-chines have to face the demand for large mov-ing and mea...
Manufacturing environments will require advanced machine tools equipped with an ultraprecision machi...
High throughput qualification of semiconductor devices is needed to improve cost efficiency. This pa...
Ultra high precision positioning and measuring ma-chines have to face the demand for increasing movi...
The majority of nanopositioning and nanomeasuring machines (NPMMs) are based on three independent li...
Production machines for next generation LSIs such as 4G-DRAMs and for large liquid crystal displays ...
Micro/nano-positioning stages are at the core of a wide range of machines and instruments such as li...
This paper presents work on the prototype of an innovative ductile 5-axis precision grinding machine...
This short study shows that in the European area high efforts are made to develop more and more prec...