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Polymeric mechanical systems sed lar an an re ved (ME tomic f surfac lution alysis, probe esolut order for optical detection of cantilever deflections. Although the perfor-mance of these probes is very high, a reduction of the fabrication costs would be interesting given the high number of probes that are normally used. Fully photoplastic probes are one alternative approach to achieve low-cost AFM probes fabrication. Genolet et al. [4] have factors have favored its application in a large variety of microsys-tems as valves [11], accelerometers [12], micro-optics [13], or Variable Optical Attenuators [14]. However, for Scanning Probe Microscopy (SPM) applications, in order to have a product that could be able to compete with existing commercial AFM probes, high fabrication yield, low stress gradient, high resolution and long term stability are necessary. The requirement that AFM probes could be used with most of commercial existing equipment is fulfilled when the cantilever bending is smaller than 1 angle deflection at the tip, to assure tha