Failure Characterization of ESD Damage in Low Temperature Poly-Si TFTs

  • Chih-chiang Chen
  • Chang-cheng Lin
  • Yung-hui Yeh
Publication date
January 2015

Abstract

The electrostatic discharge (ESD) induced failure is characterized for evaluating the yield and stability of LTPS TFTs. The impact of electrostatic discharge property is investigated in this study. The drain engineering and geometric effect relate to failure are also considered. 1

Extracted data

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