PULSED-SOURCE INTERFEROMETRY FOR CHARACTERIZATION OF RESONANT. * MICROMACHINED STRUCTURES

We present a new microscopy tool for quantitative measurement of the resonant motion of microstructure. The new instrument uses optical interferometry to generate a three-dimensionat surfkee topographic map of a vibrating mieromsehined resonator in vaouum. By strobmg the light source, the image of the moving device is fi’ozenat an arbitrary position in its vibration cycle, By varying the phase between the excitation signal and the puking of the light source, the out of plane motion of the resonant device. an be measured with a resolution of less than 0.5 nm