UV-LIGA Microfabrication of a Power Relay Based on

Most micro-sized switches (micro-relays) currently on the market or reported in the literature are solid-state devices made using semiconductor technology, with the silicon predominant material. Such devices typically have low current capacity, low off-resistance, significant on-resistance, significant power consumption, and low dielectric strength. In recent years, the fast-evolving technology of microelectromechanical system (MEMS) has opened up new opportunities for microfabricating microelectromechanical switches [Petersen, 1982, and Sakata, 1989]. However, most of the MEMS relays are based on silicon fabrication and can not be used for power applications. In this study, our approach is as follows: a UV