Microelectronics Fabrication

Abstract: The development of the second remote laboratory in the School of Electrical Information Engineering (EIE) follows the success and effectiveness of the first remote laboratory, Netlab. This second laboratory will be used to conduct experiments in the relatively narrow field of Microelectronics Fabrication, where remote laboratories rarely exist due to the obstacles specific to this field. This type of laboratory requires a substantial amount of human interaction, where users control the position of micro-probes under a microscope to test the electrical characteristics of electronic circuits on a silicon wafer. Since this remote laboratory is a pioneer in this field of education, it requires careful development and deployment. This paper showcases the laboratory and presents the tools that will be used to evaluate the effectiveness of this new remote laboratory