II. Gas-phase processes in CVD diamond.................................................................................4 A. Gas-phase chemical kinetics...............................................................................................5 B. Reactions at a hot filament...................................................................................................
A simplified model of the gas-surface chemistry occurring during chemical-vapor deposition of diamon...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1995.Includes...
Hot-filament pyrolytic chemical vapor deposition was used to deposit thin films of diamond and silic...
Kohse-Höinghaus K, Löwe AG, Atakan B. Investigations of the gas phase mechanism of diamond depositio...
This report presents a simplified surface reaction mechanism for the Chemical Vapor Deposition (CVD)...
A multi-filament diamond CVD process with an extended array of hot wires differs from the single- fi...
A simplified surface reaction mechanism is presented for the CVD of diamond thin films. The mechanis...
The preparation of diamond layers and their (nano-) structures requires the optimization of several ...
Atakan B, Kohse-Höinghaus K. On the importance of gas phase chemistry in two CVD systems: Deposition...
Present paper reviews growth of diamond thin films by various chemical vapor deposition processes. B...
274 p.Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 1993.Diamond films were deposited ...
The diamond chemical vapor deposition (CVD) process has been investigated theoretically and the morp...
Atakan B, Kohse-Höinghaus K. Combustion CVD of diamond: Gas phase diagnostics and mechanistic studie...
19. ABSTRACT (Continue on reverse if necessary and identify by block number) This document details a...
Presently there is a need for low pressure diamond chemical vapor deposition (CVD) at lower temperat...
A simplified model of the gas-surface chemistry occurring during chemical-vapor deposition of diamon...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1995.Includes...
Hot-filament pyrolytic chemical vapor deposition was used to deposit thin films of diamond and silic...
Kohse-Höinghaus K, Löwe AG, Atakan B. Investigations of the gas phase mechanism of diamond depositio...
This report presents a simplified surface reaction mechanism for the Chemical Vapor Deposition (CVD)...
A multi-filament diamond CVD process with an extended array of hot wires differs from the single- fi...
A simplified surface reaction mechanism is presented for the CVD of diamond thin films. The mechanis...
The preparation of diamond layers and their (nano-) structures requires the optimization of several ...
Atakan B, Kohse-Höinghaus K. On the importance of gas phase chemistry in two CVD systems: Deposition...
Present paper reviews growth of diamond thin films by various chemical vapor deposition processes. B...
274 p.Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 1993.Diamond films were deposited ...
The diamond chemical vapor deposition (CVD) process has been investigated theoretically and the morp...
Atakan B, Kohse-Höinghaus K. Combustion CVD of diamond: Gas phase diagnostics and mechanistic studie...
19. ABSTRACT (Continue on reverse if necessary and identify by block number) This document details a...
Presently there is a need for low pressure diamond chemical vapor deposition (CVD) at lower temperat...
A simplified model of the gas-surface chemistry occurring during chemical-vapor deposition of diamon...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1995.Includes...
Hot-filament pyrolytic chemical vapor deposition was used to deposit thin films of diamond and silic...