Collision Processes of Hydride Species in Hydrogen Plasmas: 111. The Silane Family

Cross sections are provided for most important collision processes of the Silicon-Hydrides from the "Silane-family " : SiHy (y = 1- 4) molecules and their ions SiH+, with (plasma) electrons and protons. The processes include: electron impact ionization and dissociation of SiHy, dissociative excitation, ionization and recom-bination of SiH+ ions wich electrons, and charge- and atom- exchange in proton collisions with SiHy. All important channels of dissociative processes are con-sidered. Information is also provided an the energetics (reactants/products energy loss / gain) of each individual reaction channel. Total and partial cross sections are presented in compact analytic forms. The critical assessment of data, derivation of new data and presentation of re-sults follow closely the concepts of the recently published related databases for Carbon-Hydrides, namely for the Methane family [1, 2], and for the Ethane- an