EMPIRICAL STUDY OF THE Q-FACTOR OF INTEGRATED SQUARE SPIRAL INDUCTORS ON SILICON-ON-SAPPHIRE

Abstract- Design of integrated inductors is a time consuming process usually requiring significant amount of electromagnetic simulation. During this process a designer simulates an inductor geometry that will provide the requisite inductance and usually iterates the design to achieve the maximum quality factor (Q). Due to the complexity and the lack of formulae this process is an art and the designer is guided by past designs and experience. This paper investigates the effect of geometric parameters on the Q (quality factor) of an inductor