Add to ORKGIn this paper we present the self consistent coupling of a 2D model of a parallel plate radio frequency discharge in pure hydrogen with a homogeneous chemical kinetics model including H2(X1Σg+,v=0..14) molecules and hydrogen atoms H(n=1-5). The model can estimate the ground state atomic hydrogen density and it was found that the vibrational kinetics changes the H3+ ion density and coupled power to the discharge about 40 % when comparing with previous estimates using a simplified kinetics
International audienceThe comparison of the vibrational distribution functions obtained by experimen...
Although hydrogen is the main component of many gas mixtures used for plasma processing, the physics...
This paper investigates the dependence of plasma density and self-bias voltage with excitation frequ...
In this paper we present the self consistent coupling of a 2D model of a parallel plate radio freq...
A theoretical study of the vibrational kinetics and attachment in low pressure hydrogen plasmas pro...
International audienceThis review offers an analysis of the vibrational kinetics of hydrogen molecul...
Hydrogen is the main component of many feeding mixtures used for plasma processing. Despite this, t...
In this paper we present a parametric study of the effect of discharge voltage on capacitively coup...
This paper presents a systematic characterization of a pure hydrogen capacitively coupled radio freq...
International audienceA comprehensive hybrid model of a hydrogen capacitively coupled plasma, includ...
This paper presents a systematic characterization of hydrogen capacitively coupled very high frequen...
The evolution of atmospheric pressure hydrogen plasma under the action of repetitively ns electrical...
This paper presents a systematic characterization of hydrogen capacitively coupled very high frequen...
Results from simulations of plasma and neutrals under conditions predictively characterizing the det...
International audienceThe comparison of the vibrational distribution functions obtained by experimen...
International audienceThe comparison of the vibrational distribution functions obtained by experimen...
Although hydrogen is the main component of many gas mixtures used for plasma processing, the physics...
This paper investigates the dependence of plasma density and self-bias voltage with excitation frequ...
In this paper we present the self consistent coupling of a 2D model of a parallel plate radio freq...
A theoretical study of the vibrational kinetics and attachment in low pressure hydrogen plasmas pro...
International audienceThis review offers an analysis of the vibrational kinetics of hydrogen molecul...
Hydrogen is the main component of many feeding mixtures used for plasma processing. Despite this, t...
In this paper we present a parametric study of the effect of discharge voltage on capacitively coup...
This paper presents a systematic characterization of a pure hydrogen capacitively coupled radio freq...
International audienceA comprehensive hybrid model of a hydrogen capacitively coupled plasma, includ...
This paper presents a systematic characterization of hydrogen capacitively coupled very high frequen...
The evolution of atmospheric pressure hydrogen plasma under the action of repetitively ns electrical...
This paper presents a systematic characterization of hydrogen capacitively coupled very high frequen...
Results from simulations of plasma and neutrals under conditions predictively characterizing the det...
International audienceThe comparison of the vibrational distribution functions obtained by experimen...
International audienceThe comparison of the vibrational distribution functions obtained by experimen...
Although hydrogen is the main component of many gas mixtures used for plasma processing, the physics...
This paper investigates the dependence of plasma density and self-bias voltage with excitation frequ...