Comparison of electron Boltzmann calculations and Monte Carlo simulations for spatially inhomogeneous, bounded plasmas

The nonequilibrium properties of the electron component in gas discharge plasmas are com-monly determined by solving the Boltzmann equation of the electrons using a Legendre polynomial expansion of the electron momentum distribution function or by the application of Monte Carlo simulations. For comparative kinetic studies of spatially inhomogeneous plas-mas, consistent boundary conditions at the spatial margins of the discharge arrangement are required. This contribution reports on extended boundary conditions at the electron emit-ting cathode of gas discharges which are adequate for the direct comparison of Boltzmann equation with Monte Carlo simulation results. First results for dc discharges in oxygen at conditions typical of abnormal glow discharges are discussed. 1