The paper demonstrates the use of probabilistic methods to assess the electromechanical behavior of micro electromechanical systems (MEMS) under the presence of micromachining manufacturing and process uncertainties. Probabilistic Methods are used to assess uncertainties involved in the manufacturing of MEMS devices. Probabilistic methods guide the design of these devices to achieve a robust and reliable design in a most efficient way. The methods illustrated here are implemented in the latest version of the ANSYS Finite-Element program
The ability to quantify the uncertainty of complex engineering structures subject to inherent random...
Uncertainty quantification has become an important task and an emerging topic in many engineering fi...
An important component of verification and validation of computational models is solution verificati...
Abstract: One challenge in designing micro-electro-mechanical systems (MEMS) is conside-ring the var...
A comparatively large scatter of both local material properties and random geometrical imperfections...
Uncertainty quantification (UQ) has become a necessary step in the design of most modern engineering...
Micro electromechanical systems (MEMS) are nowadays used in many applications, such as airbag accele...
MicroElectroMechanical Systems (MEMS) that think, sense, act and communicate will open up a broad ne...
In a modern product development process such as in the automotive and aerospace sectors, extensive a...
This paper compares different probabilistic optimization methods dealing with uncertainties. Reliabi...
In the mechatronic devices, the finite element analyses are the most used method to determine time-d...
The complexity challenges of mechatronic systems justify the need of numerical simulation to efficie...
MicroElectroMechanical Systems (MEMS) that think, sense, act and communicate will open up a broad ne...
International audienceThe complexity challenges of mechatronic systems justify the need of numerical...
The ability to quantify the uncertainty of complex engineering structures subject to inherent random...
The ability to quantify the uncertainty of complex engineering structures subject to inherent random...
Uncertainty quantification has become an important task and an emerging topic in many engineering fi...
An important component of verification and validation of computational models is solution verificati...
Abstract: One challenge in designing micro-electro-mechanical systems (MEMS) is conside-ring the var...
A comparatively large scatter of both local material properties and random geometrical imperfections...
Uncertainty quantification (UQ) has become a necessary step in the design of most modern engineering...
Micro electromechanical systems (MEMS) are nowadays used in many applications, such as airbag accele...
MicroElectroMechanical Systems (MEMS) that think, sense, act and communicate will open up a broad ne...
In a modern product development process such as in the automotive and aerospace sectors, extensive a...
This paper compares different probabilistic optimization methods dealing with uncertainties. Reliabi...
In the mechatronic devices, the finite element analyses are the most used method to determine time-d...
The complexity challenges of mechatronic systems justify the need of numerical simulation to efficie...
MicroElectroMechanical Systems (MEMS) that think, sense, act and communicate will open up a broad ne...
International audienceThe complexity challenges of mechatronic systems justify the need of numerical...
The ability to quantify the uncertainty of complex engineering structures subject to inherent random...
The ability to quantify the uncertainty of complex engineering structures subject to inherent random...
Uncertainty quantification has become an important task and an emerging topic in many engineering fi...
An important component of verification and validation of computational models is solution verificati...