Add to ORKGAbstract: Three-Dimensional free standing micro-objects in the micrometer range were created using Laser Chemical Vapor Deposition (LCVD) of alurninum from aluminum-trihydride-trimethylarnine. A dense grid of thin lines (about 10 pm diameter) was deposited on a pre-formed polycarbonate substrate using a two-step-process. The substrate was removed by dissolving it in a suitable solvent after ablating an unsoluble by-product by UV excimer laser pulses. The result is a free-standing three-dimensional aluminum grid micro-structure. 1
In this paper, laser chemical vapour deposition (LCVD) is explored as a method for the deposition of...
A new lithography technique is presented that exploits the interactions of immiscible liquids with a...
In this paper, we developed a scanning laser system, which allows rapid processing of freeform multi...
Three-Dimensional free standing micro-objects in the micrometer range were created using Laser Chemi...
With laser light of suitable wavelength and absorbed energy, spatial control and in-situ analysis of...
Three-dimensional laser chemical vapor deposition (3D-LCVD) is an emerging process which bridges th...
Using continuous wave visible (514 nm, 488 nm) laser beams and the gaseous precurcsors trimethylamin...
Subject of this investigation is a one-step Rapid Machining Process to create miniaturized 3D parts,...
Gas-phase Selective Area Laser Deposition (SALD) is a useful freeform fabrication tool for the prot...
The aim of this thesis is to investigate the manufacture of microlenses by Laserinduced Chemical Vap...
Laser-induced chemical vapor deposition (LCVD) is an emerging new technique with many practical appl...
Though there are a variety of microfabrication techniques, one that can fabricate three-dimensional ...
Three-dimensional laser-induced chemical vapor deposition (3D-LCVD) is a recently developed micro-ma...
Laser Chemical Vapor Deposition (LCVD) as a manufacturing process holds the potential to build comp...
A pilot study on laser 3D printing of inorganic free-form micro-optics is experimentally validated. ...
In this paper, laser chemical vapour deposition (LCVD) is explored as a method for the deposition of...
A new lithography technique is presented that exploits the interactions of immiscible liquids with a...
In this paper, we developed a scanning laser system, which allows rapid processing of freeform multi...
Three-Dimensional free standing micro-objects in the micrometer range were created using Laser Chemi...
With laser light of suitable wavelength and absorbed energy, spatial control and in-situ analysis of...
Three-dimensional laser chemical vapor deposition (3D-LCVD) is an emerging process which bridges th...
Using continuous wave visible (514 nm, 488 nm) laser beams and the gaseous precurcsors trimethylamin...
Subject of this investigation is a one-step Rapid Machining Process to create miniaturized 3D parts,...
Gas-phase Selective Area Laser Deposition (SALD) is a useful freeform fabrication tool for the prot...
The aim of this thesis is to investigate the manufacture of microlenses by Laserinduced Chemical Vap...
Laser-induced chemical vapor deposition (LCVD) is an emerging new technique with many practical appl...
Though there are a variety of microfabrication techniques, one that can fabricate three-dimensional ...
Three-dimensional laser-induced chemical vapor deposition (3D-LCVD) is a recently developed micro-ma...
Laser Chemical Vapor Deposition (LCVD) as a manufacturing process holds the potential to build comp...
A pilot study on laser 3D printing of inorganic free-form micro-optics is experimentally validated. ...
In this paper, laser chemical vapour deposition (LCVD) is explored as a method for the deposition of...
A new lithography technique is presented that exploits the interactions of immiscible liquids with a...
In this paper, we developed a scanning laser system, which allows rapid processing of freeform multi...