Model based quantification of EELS spectra: including the fine structure

An extension to model based electron energy loss spectroscopy (EELS) quantifi-cation is reported to improve the possibility of modelling fine structure changes in electron energy loss spectra. An equalisation function is used in the energy loss near edge structure (ELNES) region to model the differences between a single atom dif-ferential cross section and the cross section for an atom in a crystal. The equalisation function can be shown to approximate the relative density of unoccupied states for the given excitation edge. On a set of 200 experimental h-BN spectra, this technique leads to statistically acceptable models resulting into unbiased estimates of relative concentrations and making the estimated precisions come very close to the Cramér-Rao lower bound (CRLB). The method greatly expands the useability of model based EELS quantification to spectra with pronounced fine structure. Another ben-efit of this model is that one also gets an estimate of the unoccupied density of states for a given excitation edge, without having to do background removal and deconvolution, making the outcome intrinsically more reliable and less noisy