Self-Sensing Piezoelectric Actuator using Permittivity Detection

In positioning applications, the drawbacks of piezoelectric actuators are hysteresis, nonlinearity and creep in piezoelectric displacement. Hence, a feedback control using a displacement sensor is usually essential for a precise positioning. Such displace-ment sensors hinder device miniaturization, necessitate a complicated configuration, and increase the manufacturing cost. In this study, a self-sensing control system us-ing permittivity change detection was demonstrated. This system is based on the linear relationship between the permittivity and the piezoelectric displacement. This linear relationship was verified experimentally. And we examined the self-sensing position-ing control using a real-time permittivity change detection system, and the non-linear piezoelectric property was successfully compensated