Abstract: Miniaturized flow sensors composed of a thin membrane supporting appropriately positioned heating resistors and temperature sensors were studied by computer-numeric analysis. Significant improvements of the steady-flow transduction characteristics as well as the responses to step-like changes of the dissipated power are feasible by design modifications and new transduction schemes
This paper focuses on the development of highly sensitive calorimetric flow sensors. Both the hydrod...
Abstract ⎯ This article presents microchannel thermal flow sensors fabricated using standard microma...
Flow sensors have diverse applications in the field of biomedical engineering and also in industries...
AbstractA novel thermal flow sensor transduction method is presented combining advantages of the cal...
AbstractA novel thermal flow sensor is presented featuring three spatially separated micromachined s...
The geometric structure of a low-power thermal micro-hot film sensor has been investigated and optim...
A thermal flow transduction method combining the advantages of calorimetric and hot-film transductio...
This paper presents micromachined thermal flow sensors for measuring liquid flow down to 0.05 μl/min...
In this thesis thermal sensor-actuator structures are proposed for measuring the parameters pressure...
We present a thermal flow sensor designed for measuring air as well as water flow velocities in heat...
A thermal mass flow sensor with high dynamic flow range in silicon bulk micromachining membrane tech...
This paper investigates the differences between thermo-resistive and thermo-electronic flow sensors ...
A calorimetric miniaturized flow sensor was realized with a linear sensor response measured for wate...
Abstract—To compensate for changes in ambient temperature, thermal flow sensors are usually heated t...
[[abstract]]The design, fabrication, and application of microthermal sensors are presented in this w...
This paper focuses on the development of highly sensitive calorimetric flow sensors. Both the hydrod...
Abstract ⎯ This article presents microchannel thermal flow sensors fabricated using standard microma...
Flow sensors have diverse applications in the field of biomedical engineering and also in industries...
AbstractA novel thermal flow sensor transduction method is presented combining advantages of the cal...
AbstractA novel thermal flow sensor is presented featuring three spatially separated micromachined s...
The geometric structure of a low-power thermal micro-hot film sensor has been investigated and optim...
A thermal flow transduction method combining the advantages of calorimetric and hot-film transductio...
This paper presents micromachined thermal flow sensors for measuring liquid flow down to 0.05 μl/min...
In this thesis thermal sensor-actuator structures are proposed for measuring the parameters pressure...
We present a thermal flow sensor designed for measuring air as well as water flow velocities in heat...
A thermal mass flow sensor with high dynamic flow range in silicon bulk micromachining membrane tech...
This paper investigates the differences between thermo-resistive and thermo-electronic flow sensors ...
A calorimetric miniaturized flow sensor was realized with a linear sensor response measured for wate...
Abstract—To compensate for changes in ambient temperature, thermal flow sensors are usually heated t...
[[abstract]]The design, fabrication, and application of microthermal sensors are presented in this w...
This paper focuses on the development of highly sensitive calorimetric flow sensors. Both the hydrod...
Abstract ⎯ This article presents microchannel thermal flow sensors fabricated using standard microma...
Flow sensors have diverse applications in the field of biomedical engineering and also in industries...