Domain decomposition method for maxwell’s equations: Scattering off periodic structures

We present a domain decomposition approach for the computation of the electro-magnetic eld within periodic structures. We use a Schwarz method with transpar-ent boundary conditions at the interfaces of the domains. Transparent boundary conditions are approximated by the perfectly matched layer method (PML). To cope with Wood anomalies appearing in periodic structures an adaptive strategy to determine optimal PML parameters is developed. We focus on the application to typical EUV lithography line masks. Light prop-agation within the multi-layer stack of the EUV mask is treated analytically. This results in a drastic reduction of the computational costs and allows for the simula-tion of next generation lithography masks on a standard personal computer. Key words: domain decomposition, conical diraction, electro-magneti