Add to ORKGA large-scale, high speed, high resolution, phase-only microelectromechanical system (MEMS) spatial light modulator (SLM) has been fabricated. Using polysilicon thin film technology, the micro mirror array offers significant improvement in SLM speed in comparison to alternative modulator technologies. Pixel opto-electromechanical characterization has been quantified experimentally on large scale arrays of micro mirrors and results are reported
The design, fabrication, and preliminary test results of a microelectromechanical, micromachined spa...
The goal of this project was to make LLNL a leader in Spatial Light Modulators (SLMs) by developing ...
A new generation of spatial light modulators (SLM) is being developed based on SiO2 sacrificial laye...
The Fraunhofer IPMS and Micronic Laser Systems AB have developed a technology for microlithography u...
The devices consist of an array of independently addressable CMOS DRAM cells each controlling a micr...
Die-sized spatial light modulators (SLM) are gaining importance as microdisplays for projection syst...
Spatial light modulators (SLM) with addressing through a silicon backplane are gaining importance as...
The Fraunhofer IPMS, in cooperation with Micronic Laser Systems, develops and fabricates micromirror...
The Fraunhofer IPMS and Micronic Laser Systems AB have developed a technology for the maskless DUV m...
Design, microfabrication, and integration of a micromachined spatial light modulator (μSLM) device a...
Three different types of deformable mirror Spatial Light Modulators (SLMs) based on device concepts ...
Spatial light modulators (SLMs) based on micro-mirrors for use in DUV lithography and adaptive optic...
In this paper, we demonstrate the first high-resolution spatial-light-modulator chip with 1 million ...
Spatial light modulators (SLM) are electro-optical devices employed as optical pattern generators in...
Micro-electro mechanical systems (MEMS)-based phase-only spatial light modulators (PLMs) have the po...
The design, fabrication, and preliminary test results of a microelectromechanical, micromachined spa...
The goal of this project was to make LLNL a leader in Spatial Light Modulators (SLMs) by developing ...
A new generation of spatial light modulators (SLM) is being developed based on SiO2 sacrificial laye...
The Fraunhofer IPMS and Micronic Laser Systems AB have developed a technology for microlithography u...
The devices consist of an array of independently addressable CMOS DRAM cells each controlling a micr...
Die-sized spatial light modulators (SLM) are gaining importance as microdisplays for projection syst...
Spatial light modulators (SLM) with addressing through a silicon backplane are gaining importance as...
The Fraunhofer IPMS, in cooperation with Micronic Laser Systems, develops and fabricates micromirror...
The Fraunhofer IPMS and Micronic Laser Systems AB have developed a technology for the maskless DUV m...
Design, microfabrication, and integration of a micromachined spatial light modulator (μSLM) device a...
Three different types of deformable mirror Spatial Light Modulators (SLMs) based on device concepts ...
Spatial light modulators (SLMs) based on micro-mirrors for use in DUV lithography and adaptive optic...
In this paper, we demonstrate the first high-resolution spatial-light-modulator chip with 1 million ...
Spatial light modulators (SLM) are electro-optical devices employed as optical pattern generators in...
Micro-electro mechanical systems (MEMS)-based phase-only spatial light modulators (PLMs) have the po...
The design, fabrication, and preliminary test results of a microelectromechanical, micromachined spa...
The goal of this project was to make LLNL a leader in Spatial Light Modulators (SLMs) by developing ...
A new generation of spatial light modulators (SLM) is being developed based on SiO2 sacrificial laye...