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ect eon f Engi ogy (K form various applications including microelectronics [1], optical using a photomask to generate octadecyl/silanol-pattern. (2004catalysts [4], microorganism photolysis [5], antifogging and self-cleaning coatings [6], gratings [7], gate oxides in metal-oxide-semiconductor field effect transistor (MOS-FETs) [8.9], etc. Accordingly, various attempts have been made to fabricate thin films and micropatterns of TiO2 by several methods, and in particular, to synthesize materials and devices including TiO2 thin films from an aqueous solution through an environment-friendly synthesis process, i.e., ‘‘green chemistry’’. the use of titanium dichloride diethoxide (TDD). Amorphous TiO2 films were selectively deposited on silanol regions. Annealing the films at high temperatures (400–600 jC) gave rise to an anatase phase, while the resolution of amicropattern remained unchanged. However, annealing process is required to obtain patterns of anatase TiO2 thin films in this process. On the other hand, a micropattern of anatase TiO2 thin film was fabricated by the site-selective immersion [15] method using a SAM which has a pattern of both hydrophilic andcells [2], solar energy conversion [3], highly efficient They were used as templates to deposit TiO2 thin films bysolution. Furthermore, deposition mechanism of anatase TiO2 in an aqueous solution has been evaluated in detail. The adhesion of homogeneously nucleated particles to the amino group surface by attractive electrostatic interaction caused rapid growth of TiO2 thin films in the supersaturated solution at pH 2.8. On the other hand, TiO2 was deposited on self-assembled monolayers (SAMs) without the adhesion of TiO2 particles regardless of the type of SAM in the solution at pH 1.5 whose degree of supersaturation is low due to high concentration of H Additionally, the orientation of films deposited on all SAMs was shown to be improved by enlarging the reaction time regardless of the kind of SAM or pH. It is conjectured that the adsorption of anions to specific crystal planes caused c-axis orientation of anatase TiO2