Tunable Infrared Filter based on a Fabry-Perot-Interferometer

Much effort has been involved in developing micromachined optical filters on base of Fabry-Perot-interferometers (FPI) in recent years. Most of them is dedicated to wavelength division multiplexing for optical communication or to gas analysis in near or mid infrared [1- 3]. Dielectric mirrors are applied for reflectors in almost every case because of their low absorption compared to metal reflection layers. Most important propertie