Plasma etching and modification of organic polymers

Abstract- Etching and modification of polymers by plasmas is discussed in terms of the roles played by atomic and molecular oxygen, atomic fluorine, CFx radicals, ions, high energy metastable species, and photons. Addition of fluorine-containing gases to oxygen can increase both 0 atom densities in the plasma and polymer etching rates. The etching rate be-havior generally exhibits a maximum at a specific concentration of this additive. Process parameters which alter the concentrations of 0 and F atoms in the plasma or affect the rate of delivery of these species to the polymer surface shift the position of this maximum with respect to feed gas composition. However, the gas composition which yields maximum rates exhibits a strong dependence on polymer structure, specifically, its degree of unsaturation. This is explained on the basis of molecular orbital (MO) arguments which predict that the surfaces of unsaturated polymers have a higher affinity than saturated polymer surfaces for atomic fluorine. Favored reaction pathways leading to volatile etching products are pro-posed based on MO calculations of relative bond strengths for various oxygenated and fluorinated organic model compounds. Although fluorine abstraction of hydrogen plays a major role in generating radical sites on saturated polymer surfaces, it is likely that etching of unsaturated moieties proceeds through a saturated radical intermediate resulting from addition reactions of fluorine atoms. Excessive amounts of fluorine in the plasma result in reduced etching rates and incorporation of fluorine and/or CFx radicals into the polymer. Polymer film surfaces are also modified by high energy metastables and ultraviolet radiation generated from noble gas plasmas, The effect of vacuum ultraviolet radiation from helium microwave plasmas on films of polytetrafluoroethylene and polyethylene is addressed