1 Developments in Multi-Signal Micro-Analytical Characterisation Techniques using a Scanning Electron Beam.

Cathodoluminescence (CL) performed in the SEM is a powerful technique in its own right, providing a wealth of diverse information. Spectroscopic CL studies are unique in providing high spatial resolution optical information. As the phenomena governing the light generation and emission are often complex, successful characterisation of a specimen may be achieved by performing complementary techniques in the same instrument. This paper looks at future trends for combined Cathodoluminescence and other micro-characterisation techniques in the SEM, STEM or EPMA. Key Words: Cathodoluminescence, spectrum-imaging, multi-signal, micro-analysis