Extraction of Glass-Wafers Electrical Properties Based on S-Parameters Measurements of Coplanar Waveguides

The measured S-parameters of a coplanar waveguide (CPW) propagating the dominant mode were used to obtain the electrical permittivity and the dielectric loss tangent of three different glass wafers: non-alkaline Schott AF45, Corning Pyrex #7740 and Hoya SD-2. These properties were obtained up to 10 GHz. The obtained values were used together with the CPW model in ADS to obtain the simulated S-parameters for the used CPW cell. The obtained results shows good agreement between simulated and measured data. I