Dielectric Characteristics of SrTiO3 Precursor Thin Film Prepared on Self-assembled Monolayers by the Liquid Phase Deposition Method

We evaluated the dielectric properties of amorphous SrTiO3 precursor thin films in relation to the film thickness and morphology. The film was fabricated by our newly developed method based on the combination of the self-assembled monolayers technique and the liquid phase deposition method. The film thickness was varied from 60 nm to 190 nm. The permittivities of 21 – 28 at 100 kHz were obtained. The leakage currents at the electric field strength of 0.1 MV×cm-1 (corresponding to 0.6 – 1.9 V) were all of the order of 10-6 A×cm-2