SINGLE-CRYSTAL SILICON CONTINUOUS MEMBRANE DEFORMABLE MIRROR WITH PZT UNIMORPH MICROACTUATOR ARRAYS

For the first time, this paper reports on the piezoelectric unimorph-based deformable mirror (DM) with continuous single-crystal silicon deformable membrane PZT unimorph actuator of 2 5nim diameter with optimized PZT/Si thickness and design showed a deflection of 5pm at 50V DMs consisting of l0pm thick single-crystal silicon membranes supported by 4x4 actuator arrays were fabricated and optically characterized The fabricated DM showed a stroke of 2 5pm at 50V with resonant frequency of 42 kHz and influence function of-25