Plasma treatment of polymer surfaces in different Gasses

Abstract. In the present paper we have tried to research plasma surface mod-ification of polyethylene terephthalate. This was realized in capacitive RF-discharge (13.56 MHz). Four gases were used: argon (Ar), oxygen (O2), freon 14 (CF4) and freon 12 (CF2Cl2) in flowing gas discharge regime. The time of burning of the discharge ttr was changing gradually from 0.1 to 100 s. In this interval, the experimental results of the measured contact angle θ and the adhe-sion work WA at the time ttr were shown. Through behavior at circumstances for creation and addition of different functional groups on the pattern polymer surface, the results were described qualitatively by supposing three kinds of modification: modification by changing, modification by etching and modifi-cation by polymerization. Mass spectrometric researches were made. Data of changes in thickness of the pattern were also presented during the time of treat-ment. The results of the angle θ in our paper showed high influence by the residual oxygen-containing gases, which were basically obtained as a result of gas emission of the pattern and the materials in plasma-chemical reactor during the time of treatment. PACS number: 52.80.Hc, 82.35.Lr