Improved Ruggedized SOI Transducers Operational Above 600°C

The need for semiconductor pressure transducers that can be used in applications requiring operation in harsh environments that are corrosive, oxidizing, experiencing high vibration, and involving high temperatures continues to increase. This paper reports on the latest developments of Silicon-On-Insulator (SOI) piezoresistive pressure sensors for extreme environments. Challenges which can arise from use of these sensors in ultra harsh environments are reviewed and the design of the latest “leadless”, miniature, dynamic pressure transducers capable of operating reliably under extreme environmental conditions [1) temperatures in excess of 600°C and 2) accelerations greater than 200g] – is described in detail. The performance of such “leadless ” pressure transducers is presented and indicates that ruggedized, high frequency, miniature, vibration insensitive piezoresistive transducers with improved performance characteristics are now feasible for use in extremely harsh, high temperature environments