Optimum sensitive area of surface acoustic wave resonator chemical and bio-sensors

Abstract — A model is developed to map the variation of sensitivity of a Surface Acoustic Wave (SAW) resonator sensor over its surface, in order to find the region with maximum sensitivity. The model is based on a combined Coupling of Modes (COM) and periodic Green’s function analysis. In order to extend the analysis to layered media, a new efficient technique is introduced to account for the mechanical interactions with buried electrodes. Using this technique the sensitivity calculations are found to be in good agreement with measurements. It is also shown that whilst changes in other parameters influence the sensitivity, it is the velocity change which most strongly determines the overall frequency change. I