Appl. Phys. A 62, 503—508 (1996) Pyrolytic LCVD of fibers: A theoretical description

Abstract. The pyrolytic LCVD (Laser-induced Chemical Vapor Deposition) of fibers is studied theoretically. The shape of fibers and the temperature distribution are cal-culated self-consistently on the basis of a one-dimensional model which takes into account changes of the radius along the fiber. The influence of different parameters on the fiber radius and the temperature is discussed. The parameters investigated include the laser power and spot size, the activation energy of the deposition reaction, diffusion limitations in the gas phase, and temperature dependences of the heat conductivities of the deposit and the gas. The results are applied to the pyrolytic growth of Si fibers from SiH