Modeling Piezoelectric Stack ALctuators for Control of Micromanipulation

nonlinear lumped-parameter model of a piezoelectric stack A, ctuator has been developed to describe actuator behavior for purposes of control system analysis and design, and, in particular, for microrobotic applications requiring accurate position andor force control. In formulating this model, the authors propose a generalized Maxwell resistive capacitor as a lumped-parameter causal representation of rate-independent hysteresis. Model for-mulation is validated by comparing results of numerical simula-tions to experimental data. Validation is followed by a discussion of model implications for purposes of actuator control. Actuation for Interactive Micromanipulation Micromanipulator applications, and in particular dynami-cally interactive micromanipulation, require control actuators that can provide both accurate position tracking performance in addition to robustly stable force control [2,7, 131. These objec-tives are significantly compromised by the presence of backlas