MEMS / Nanotechnology Integration for Bio-Medical Applications

The integration of MEMS and nanotechnologies has resulted in new capabilities for environmental monitoring and bio-nano sciences. The capabilities are enabled through a new type class of gas sensors and novel techniques for identifying and manipulating biological cells. After a brief introduction into micromachining, the lecture will discuss three examples each of (1) a new generation of gas sensors with higher sensitivity, lighter weight, and lower power consumption, (2) ultra-sensitive molecular detection and characterization devices, and (3) manipulation techniques for singles cells. 1. Gas Sensors The first sensor example is the use of nanoparticles for conventional tin-oxide gas sensors (Ref. 1). To improve the long-term stability of gas sensors, MicroChemical Systems (MiCS) is manufacturing silicon micromachined gas sensors that combine silicon microstructures with nanomaterials. MiCS deposits precise amounts of nanoparticle metal oxide material as the sensitive layer on a micro-hotplate. Due to the very small grain size, such sensors have high stability and sensitivity. Key elements of the sensor include a sensitive metal oxide layer whose resistance/conductivity change