Abstract—Process-induced variations and sub-threshold leakage in bulk-Si technology limit the scaling of SRAM into sub-32 nm nodes. New device architectures are being considered to improve control and reduce short channel effects. Among the likely candidates, FinFETs are the most attractive option be-cause of their good scalability and possibilities for further SRAM performance and yield enhancement through independent gating. The enhancements to read/write margins and yield are investi-gated in detail for two cell designs employing independently gated FinFETs. It is shown that FinFET-based 6-T SRAM cells designed with pass-gate feedback (PGFB) achieve significant improvements in the cell read stability without area penalty. The write-abili...