Motion Controller Resident Collision Avoidance

Automated machines are being given greater respon-sibilities. Particularly in the semiconductor industry, a single work-in-process wafer may be more valuable than the ma-chine handling it. A machine work area can be crowded with delicate and expensive tooling including microscope optics and fixtures. A single positioning mistake, such as an improp-erly trained point or incorrectly calculated destination, can produce a machine collision. A collision damages expensive tooling and mechan-ics, wastes work in process, stops system development or production, and contaminates a clean environment. Measures must be taken to avert these outcomes. Regardless of the commands sent to the motion controller, the machine should never collide with tooling, fixtures, or mechanical limits