Atomic Force Microscopy

force microscope (AFM) has been demonstrated to have many advantages over its conventional counterpart: the scanning-sample (stationary-probe)-type AFM. However, its major chal-lenge is to measure the deflection of the probe while moving in three-dimensional (3-D) space. Utilizing a distinctively arranged correction lens in the optomechatronic integrated design, this paper proposes a novel laser beam tracking system to overcome the aforementioned challenge. An innovative method to minimize “false deflection ” is devised. This system has been verified to achieve high scanning speed without sacrificing high tracking accuracy. Index Terms—Atomic force microscope (AFM), nanotopogra-phy, optical position measurement, optomechatronics, scanning probe microscope (SPM). I